Piezoelectric MEMS Resonators by Harmeet Bhugra & Gianluca Piazza
Author:Harmeet Bhugra & Gianluca Piazza
Language: eng
Format: epub
Publisher: Springer International Publishing, Cham
38.
Songbin G, Piazza G (2013) Large frequency tuning of lithium niobate laterally vibrating MEMS resonators via electric boundary reconfiguration. In: The 17th international conference on solid-state sensors, actuators and microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII, 2013, pp 2465–2468
39.
Tazzoli A, Rinaldi M, Piazza G (2012) Experimental investigation of thermally induced nonlinearities in aluminum nitride contour-mode MEMS resonators. IEEE Electron Dev Lett 33:724–726CrossRef
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